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| MOTOROLA SEMICONDUCTOR TECHNICAL DATA Order this document by MPX5700/D MPX5700 Integrated Silicon Pressure Sensor On-Chip Signal Conditioned, Temperature Compensated and Calibrated The MPX5700 series piezoresistive transducer is a state-of-the-art monolithic silicon pressure sensor designed for a wide range of applications, but particularly those employing a microcontroller or microprocessor with A/D inputs. This patented, single element transducer combines advanced micromachining techniques, thin-film metallization, and bipolar processing to provide an accurate, high level analog output signal that is proportional to the applied pressure. Features * 2.5% Maximum Error over 0 to 85C * Ideally Suited for Microprocessor or Microcontroller-Based Systems * Available in Differential and Gauge Configurations * Patented Silicon Shear Stress Strain Gauge * Durable Epoxy Unibody Element BASIC CHIP CARRIER ELEMENT CASE 867-08, STYLE 1 SERIES INTEGRATED PRESSURE SENSOR 0 to 700 kPa (0 to 101.5 psi) 0.2 to 4.7 V OUTPUT VS 3 X-ducer SENSING ELEMENT THIN FILM TEMPERATURE COMPENSATION AND GAIN STAGE #1 2 GND GAIN STAGE #2 AND GROUND REFERENCE SHIFT CIRCUITRY 1 Vout DIFFERENTIAL PORT OPTION CASE 867C-05, STYLE 1 PINS 4, 5 AND 6 ARE NO CONNECTS PIN NUMBER 1 2 3 Vout Gnd VS 4 5 6 N/C N/C N/C Figure 1. Fully Integrated Pressure Sensor Schematic MAXIMUM RATINGS(1) v 1 Atmosphere) Burst Pressure (P2 v 1 Atmosphere) Overpressure (P2 Storage Temperature Operating Temperature Parametrics Symbol P1max P1burst Tstg TA Value 2800 5000 - 40 to +125 - 40 to +125 Unit kPa kPa C C NOTE: Pins 4, 5, and 6 are internal device connections. Do not connect to external circuitry or ground. Pin 1 is noted by the notch in the Lead. 1. TC = 25C unless otherwise noted. Maximum Ratings apply to Case 867-08 only. 2. Extended exposure at the specified limits may cause permanent damage or degradation to the device. 3. This sensor is designed for applications where P1 is always greater than, or equal to P2. Senseon and X-ducer are trademarks of Motorola, Inc. REV 2 Motorola Sensor Device Data (c) Motorola, Inc. 1997 1 MPX5700 SERIES OPERATING CHARACTERISTICS (VS = 5.0 Vdc, TA = 25C unless otherwise noted, P1 > P2) Characteristic Pressure Range(1) Supply Voltage(2) Supply Current Zero Pressure Offset(3) Full Scale Output(4) Full Scale Span(5) Accuracy(6) Sensitivity Response Time(7) Output Source Current at Full Scale Output Warm-Up Time(8) Decoupling circuit shown in Figure 4 required to meet electrical specifications. (0 to 85C) (0 to 85C) (0 to 85C) (0 to 85C) Symbol POP VS Io Voff VFSO VFSS -- V/P tR IO+ -- Min 0 4.75 - 0.088 4.587 -- -- -- -- -- -- Typ -- 5.0 7.0 0.2 4.7 4.5 -- 6.4 1.0 0.1 20 Max 700 5.25 10 0.313 4.813 -- 2.5 -- -- -- -- Unit kPa Vdc mAdc Vdc Vdc Vdc %VFSS mV/kPa ms mAdc ms MECHANICAL CHARACTERISTICS Characteristic Weight, Basic Element (Case 867) Cavity Volume Volumetric Displacement Symbol -- -- -- Min -- -- -- Typ 4.0 -- -- Max -- 0.01 0.001 Unit Grams IN3 IN3 NOTES: 1. 1.0 kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. 3. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 4. Full Scale Output (VFSO) is defined as the output voltage at the maximum or full rated pressure. 5. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 6. Accuracy (error budget) consists of the following: * Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range. * Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. * Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25C. * TcSpan: Output deviation over the temperature range of 0 to 85C, relative to 25C. * TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85C, relative to 25C. * Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of VFSS, at 25C. 7. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 8. Warm-up is defined as the time required for the device to meet the specified output voltage after the pressure has been stabilized. 9. P2 max is 500 kPa. 2 Motorola Sensor Device Data MPX5700 SERIES ON-CHIP TEMPERATURE COMPENSATION, CALIBRATION AND SIGNAL CONDITIONING Figure 3 illustrates both the Differential/Gauge and the Absolute Sensing Chip in the basic chip carrier (Case 867). A fluorosilicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the sensor diaphragm. (For use of the MPX5700D in a high pressure, cyclic application, consult the factory.) The MPX5700 series pressure sensor operating characteristics, and internal reliability and qualification tests are based on use of dry air as the pressure media. Media, other than dry air, may have adverse effects on sensor performance and long-term reliability. Contact the factory for information regarding media compatibility in your application. Figure 4 shows a typical decoupling circuit for interfacing the sensor to the A/D input of a microprocessor. Proper decoupling of the power supply is recommended. Figure 2 shows the sensor output signal relative to pressure input. Typical, minimum, and maximum output curves are shown for operation over a temperature range of 0 to 85C using the decoupling circuit below. (The output will saturate outside of the specified pressure range.) 5.0 TRANSFER FUNCTION: Vout = VS*(0.0012858*P+0.04) ERROR 4.0 VS = 5.0 Vdc TEMP = 0 to 85C 3.5 4.5 OUTPUT (V) 3.0 2.5 2.0 1.5 1.0 0.5 0 0 100 200 400 600 300 500 DIFFERENTIAL PRESSURE (kPa) 700 800 MAX MIN TYPICAL Figure 2. Output versus Pressure Differential FLUORO SILICONE DIE COAT DIE P1 WIRE BOND STAINLESS STEEL METAL COVER MPX5700 OUTPUT (PIN 1) 50 pF 51 k LEAD FRAME Motorola Sensor Device Data EEEEEEEEEEE EEEEEEEEEEE EEEEEEEEEEE EEEEEEEEEEE EEEEEEEEEEE P2 EPOXY CASE A/D PROCESSOR RTV DIE BOND Figure 3. Cross-Sectional Diagram (Not to Scale) Figure 4. Typical Decoupling Filter for Sensor to Microprocessor Interface 3 MPX5700 SERIES PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE Motorola designates the two sides of the pressure sensor as the Pressure (P1) side and the Vacuum (P2) side. The Pressure (P1) side is the side containing fluoro silicone gel which protects the die from harsh media. The Motorola MPX pressure sensor is designed to operate with positive differential pressure applied, P1 > P2. The Pressure (P1) side may be identified by using the table below: Pressure (P1) Side Identifier Stainless Steel Cap Side with Part Marking Side with Port Attached Side with Port Attached Side with Port Attached Part Number MPX5700D MPX5700DP MPX5700GP MPX5700GS MPX5700GSX Case Type 867-08C 867C-05 867B-04 867E-03 867F-03 ORDERING INFORMATION The MPX5700 pressure sensor is available in differential and gauge configurations. Devices are available in the basic element package or with pressure port fittings that provide printed circuit board mounting ease and barbed hose pressure connections. MPX Series Device Type DiT Basic Element Ported Elements Differential Differential Dual Ports Gauge Gauge, Axial Gauge, Axial PC Mount Options Oi Case Type C T 867-08C 867C-05 867B-04 867E-03 867F-03 Order Number MPX5700D MPX5700DP MPX5700GP MPX5700GS MPX5700GSX Device Marking MPX5700D MPX5700DP MPX5700GP MPX5700D MPX5700D 4 Motorola Sensor Device Data MPX5700 SERIES PACKAGE DIMENSIONS C R M B -A- N PIN 1 SEATING PLANE 1 2 3 4 5 6 POSITIVE PRESSURE (P1) NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION -A- IS INCLUSIVE OF THE MOLD STOP RING. MOLD STOP RING NOT TO EXCEED 16.00 (0.630). INCHES MIN MAX 0.595 0.630 0.514 0.534 0.200 0.220 0.027 0.033 0.048 0.064 0.100 BSC 0.014 0.016 0.695 0.725 30 _NOM 0.475 0.495 0.430 0.450 0.090 0.105 STYLE 1: PIN 1. 2. 3. 4. 5. 6. MILLIMETERS MIN MAX 15.11 16.00 13.06 13.56 5.08 5.59 0.68 0.84 1.22 1.63 2.54 BSC 0.36 0.40 17.65 18.42 30 _NOM 12.07 12.57 10.92 11.43 2.29 2.66 L -T- G F D 6 PL 0.136 (0.005) M J S TA M DIM A B C D F G J L M N R S CASE 867-08 ISSUE N BASIC ELEMENT (A, D) VOUT GROUND VCC V1 V2 VEX -T- R SEATING PLANE A U L V PORT #1 POSITIVE PRESSURE (P1) NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. DIM A B C D F G J K L N P Q R S U V S INCHES MIN MAX 1.145 1.175 0.685 0.715 0.305 0.325 0.027 0.033 0.048 0.064 0.100 BSC 0.014 0.016 0.695 0.725 0.290 0.300 0.420 0.440 0.153 0.159 0.153 0.159 0.230 0.250 0.220 0.240 0.910 BSC 0.182 0.194 MILLIMETERS MIN MAX 29.08 29.85 17.40 18.16 7.75 8.26 0.68 0.84 1.22 1.63 2.54 BSC 0.36 0.41 17.65 18.42 7.37 7.62 10.67 11.18 3.89 4.04 3.89 4.04 5.84 6.35 5.59 6.10 23.11 BSC 4.62 4.93 N -Q- B K 1 2 3 4 5 6 PIN 1 S G D 6 PL 0.13 (0.005) C J -P- 0.25 (0.010) M TQ M F M TP Q S STYLE 1: PIN 1. 2. 3. 4. 5. 6. VOUT GROUND VCC V1 V2 VEX CASE 867B-04 ISSUE E PRESSURE SIDE PORTED (AP, GP) Motorola Sensor Device Data 5 MPX5700 SERIES PACKAGE DIMENSIONS-CONTINUED P 0.25 (0.010) X R PORT #1 POSITIVE PRESSURE (P1) PORT #2 VACUUM (P2) M TQ M -A- U W L V NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. DIM A B C D F G J K L N P Q R S U V W X INCHES MIN MAX 1.145 1.175 0.685 0.715 0.405 0.435 0.027 0.033 0.048 0.064 0.100 BSC 0.014 0.016 0.695 0.725 0.290 0.300 0.420 0.440 0.153 0.159 0.153 0.159 0.063 0.083 0.220 0.240 0.910 BSC 0.182 0.194 0.310 0.330 0.248 0.278 STYLE 1: PIN 1. 2. 3. 4. 5. 6. MILLIMETERS MIN MAX 29.08 29.85 17.40 18.16 10.29 11.05 0.68 0.84 1.22 1.63 2.54 BSC 0.36 0.41 17.65 18.42 7.37 7.62 10.67 11.18 3.89 4.04 3.89 4.04 1.60 2.11 5.59 6.10 23.11 BSC 4.62 4.93 7.87 8.38 6.30 7.06 PORT #2 VACUUM (P2) N PORT #1 POSITIVE PRESSURE (P1) -Q- B PIN 1 1 2 3 4 5 6 K S C SEATING PLANE -T- -T- J SEATING PLANE G F D 6 PL 0.13 (0.005) M A M VOUT GROUND VCC V1 V2 VEX CASE 867C-05 ISSUE F PRESSURE AND VACUUM SIDES PORTED (DP) C A NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. -B- V PIN 1 PORT #1 POSITIVE PRESSURE (P1) 6 5 4 3 2 1 K S G F D 6 PL M J N E -T- DIM A B C D E F G J K N S V INCHES MIN MAX 0.690 0.720 0.245 0.255 0.780 0.820 0.027 0.033 0.178 0.186 0.048 0.064 0.100 BSC 0.014 0.016 0.345 0.375 0.300 0.310 0.220 0.240 0.182 0.194 STYLE 1: PIN 1. 2. 3. 4. 5. 6. MILLIMETERS MIN MAX 17.53 18.28 6.22 6.48 19.81 20.82 0.69 0.84 4.52 4.72 1.22 1.63 2.54 BSC 0.36 0.41 8.76 9.53 7.62 7.87 5.59 6.10 4.62 4.93 0.13 (0.005) TB M CASE 867E-03 ISSUE D PRESSURE SIDE PORTED (AS, GS) VOUT GROUND VCC V1 V2 VEX 6 Motorola Sensor Device Data MPX5700 SERIES PACKAGE DIMENSIONS-CONTINUED -T- C E A U -Q- NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. DIM A B C D E F G J K N P Q R S U V INCHES MIN MAX 1.080 1.120 0.740 0.760 0.630 0.650 0.027 0.033 0.160 0.180 0.048 0.064 0.100 BSC 0.014 0.016 0.220 0.240 0.070 0.080 0.150 0.160 0.150 0.160 0.440 0.460 0.695 0.725 0.840 0.860 0.182 0.194 STYLE 1: PIN 1. 2. 3. 4. 5. 6. MILLIMETERS MIN MAX 27.43 28.45 18.80 19.30 16.00 16.51 0.68 0.84 4.06 4.57 1.22 1.63 2.54 BSC 0.36 0.41 5.59 6.10 1.78 2.03 3.81 4.06 3.81 4.06 11.18 11.68 17.65 18.42 21.34 21.84 4.62 4.93 V N B R PIN 1 PORT #1 POSITIVE PRESSURE (P1) -P- 0.25 (0.010) M TQ M 6 5 4 3 2 1 S K J 0.13 (0.005) M TP S D 6 PL QS F G CASE 867F-03 ISSUE D PRESSURE SIDE PORTED (ASX, GSX) VOUT GROUND VCC V1 V2 VEX Motorola Sensor Device Data 7 MPX5700 SERIES Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. "Typical" parameters which may be provided in Motorola data sheets and/or specifications can and do vary in different applications and actual performance may vary over time. All operating parameters, including "Typicals" must be validated for each customer application by customer's technical experts. Motorola does not convey any license under its patent rights nor the rights of others. Motorola products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications intended to support or sustain life, or for any other application in which the failure of the Motorola product could create a situation where personal injury or death may occur. Should Buyer purchase or use Motorola products for any such unintended or unauthorized application, Buyer shall indemnify and hold Motorola and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that Motorola was negligent regarding the design or manufacture of the part. Motorola and are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal Opportunity/Affirmative Action Employer. Mfax is a trademark of Motorola, Inc. How to reach us: USA / EUROPE / Locations Not Listed: Motorola Literature Distribution; P.O. Box 5405, Denver, Colorado 80217. 303-675-2140 or 1-800-441-2447 JAPAN: Nippon Motorola Ltd.; Tatsumi-SPD-JLDC, 6F Seibu-Butsuryu-Center, 3-14-2 Tatsumi Koto-Ku, Tokyo 135, Japan. 81-3-3521-8315 MfaxTM: RMFAX0@email.sps.mot.com - TOUCHTONE 602-244-6609 ASIA/PACIFIC: Motorola Semiconductors H.K. Ltd.; 8B Tai Ping Industrial Park, - US & Canada ONLY 1-800-774-1848 51 Ting Kok Road, Tai Po, N.T., Hong Kong. 852-26629298 INTERNET: http://motorola.com/sps 8 MPX5700/D Motorola Sensor Device Data |
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